JPS6184861A - 光センサアレイとその製造方法 - Google Patents

光センサアレイとその製造方法

Info

Publication number
JPS6184861A
JPS6184861A JP59207346A JP20734684A JPS6184861A JP S6184861 A JPS6184861 A JP S6184861A JP 59207346 A JP59207346 A JP 59207346A JP 20734684 A JP20734684 A JP 20734684A JP S6184861 A JPS6184861 A JP S6184861A
Authority
JP
Japan
Prior art keywords
electrode
thin film
photoconductive
thickness
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59207346A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0436579B2 (en]
Inventor
Mikihiko Nishitani
幹彦 西谷
Yoichi Harada
洋一 原田
Takahiro Nishikura
西倉　孝弘
Kosuke Ikeda
光佑 池田
Toshio Yamashita
敏夫 山下
Noboru Yoshigami
由上　登
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP59207346A priority Critical patent/JPS6184861A/ja
Publication of JPS6184861A publication Critical patent/JPS6184861A/ja
Publication of JPH0436579B2 publication Critical patent/JPH0436579B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H10F39/191—Photoconductor image sensors

Landscapes

  • Solid State Image Pick-Up Elements (AREA)
JP59207346A 1984-10-02 1984-10-02 光センサアレイとその製造方法 Granted JPS6184861A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59207346A JPS6184861A (ja) 1984-10-02 1984-10-02 光センサアレイとその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59207346A JPS6184861A (ja) 1984-10-02 1984-10-02 光センサアレイとその製造方法

Publications (2)

Publication Number Publication Date
JPS6184861A true JPS6184861A (ja) 1986-04-30
JPH0436579B2 JPH0436579B2 (en]) 1992-06-16

Family

ID=16538213

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59207346A Granted JPS6184861A (ja) 1984-10-02 1984-10-02 光センサアレイとその製造方法

Country Status (1)

Country Link
JP (1) JPS6184861A (en])

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58155758A (ja) * 1982-03-10 1983-09-16 Matsushita Electric Ind Co Ltd 光電変換素子およびその製造方法
JPS59125656A (ja) * 1982-12-25 1984-07-20 Fujitsu Ltd 光導電素子アレイの製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58155758A (ja) * 1982-03-10 1983-09-16 Matsushita Electric Ind Co Ltd 光電変換素子およびその製造方法
JPS59125656A (ja) * 1982-12-25 1984-07-20 Fujitsu Ltd 光導電素子アレイの製造方法

Also Published As

Publication number Publication date
JPH0436579B2 (en]) 1992-06-16

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